Simulaciones varias de actuadores MEMS capacitivos

Abstract

In this degree work, simulations of the voltage-controlled cantilever MEMS study are performed in the COMSOL Multiphysics program. The deflection of the cantilever is studied, for which various voltages are calculated, such as the Pull in voltage, and the capacitance and voltage plots are obtained. The study of two geometries is carried out, the first geometry with length of 150(𝜇𝓂) of the cantilever that when applying a voltage from 0V to 12V produced a capacitance obtaining a variation between the values of 1. 471383632366-15(F) Maxwell capacitance, which in turn made the cantilever make its deformation in the simulation, we managed to obtain the Pull in voltage, this occurs when the electrical forces exceed the mechanical forces, most importantly we managed to perform the displacement visualizing the behavior of the electric field, displacement field of the cantilever, our second geometry with dimensions of 80(𝜇𝓂), we applied voltage from 0V to 12V we managed to obtain capacitance values 844. 0054266026096e-18(F) Maxwell capacitance lower capacitance values referring to our first geometry, changes in the deformation arose since with smaller dimensions the cantilever did not reach the point of contact between electrodes, resulting in an incomplete deformation, since the smaller the dimensions of the cantilever the smaller the displacement.